High Purity PTFE Diaphragm Pumps
YTS High Purity diaphragm pumps are manufactured from high grade virgin PTFE.
These Class 1000 clean room pumps have very high chemical resistance, low particle counts and reduced chance of metallic ion contamination.
They are designed specifically to transfer highly aggressive slurry laden chemicals in a clean metal free process. Pumps are used primarily in the manufacture of semiconductor chips as well as in some laboratories and clean rooms.
Pumps design reduces the chance of dangerous liquid leakage. Construction utilize heavy duty reinforcement plates, fully bolted body and machined liquid mating surfaces. Short stroke operation of the pumps minimize liquid pulsation.
Special non-lubricated Air Motor with new Looped C ® Spool is designed to reduce process contamination, offering clean emissions free exhaust air.
Pumps offers consistent and precision fluid transfer, thus specific amounts of fluid can be transferred and metered.
They are self prime, they can run dry and work in dead head applications. Construction is fully modular with replaceable parts, independent pilot valves and with outside accessible air spool.
Pumps can be equipped with ball or flat High Purity PTFE valves.
Patented
YTS
High Performance
Looped C®
Air Spool
high purity PTFE double diaphragm pumps performance charts
